Author Affiliations
Abstract
1 Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, State Key Laboratory of High Field Laser Physics, Shanghai, China
2 South China University of Technology, School of Physics and Optoelectronics, Guangzhou, China
A supercontinuum white laser with ultrabroad bandwidth, intense pulse energy, and high spectral flatness can be accomplished via synergic action of third-order nonlinearity (3rd-NL) and second-order nonlinearity. In this work, we employ an intense Ti:sapphire femtosecond laser with a pulse duration of 50 fs and pulse energy up to 4 mJ to ignite the supercontinuum white laser. Remarkably, we use water instead of the usual solid materials as the 3rd-NL medium exhibiting both strong self-phase modulation and stimulated Raman scattering effect to create a supercontinuum laser with significantly broadened bandwidth and avoid laser damage and destruction. Then the supercontinuum laser is injected into a water-embedded chirped periodically poled lithium niobate crystal that enables broadband and high-efficiency second-harmonic generation. The output white laser has a 10 dB bandwidth encompassing 413 to 907 nm, more than one octave, and a pulse energy of 0.6 mJ. This methodology would open up an efficient route to creating a long-lived, high-stability, and inexpensive white laser with intense pulse energy, high spectral flatness, and ultrabroad bandwidth for application to various areas of basic science and high technology.
intense white laser optical-damage-free water third-order nonlinearity second-order nonlinearity 
Advanced Photonics Nexus
2024, 3(1): 016008
作者单位
摘要
1 中国科学院上海光学精密机械研究所超强激光科学与技术重点实验室,上海 201800
2 中国科学院上海光学精密机械研究所信息光学与光电技术实验室,上海 201800
3 中国科学院大学,北京 100049
4 中国科学院上海光学精密机械研究所精密光学工程部(筹),上海 201800
锡液滴发生器是激光等离子体型极紫外(LPP-EUV)光刻光源中最重要的核心部件之一。光刻光源要求锡液滴靶具备高重复频率、小直径且稳定性好的特性。综述了中国科学院上海光学精密机械研究所EUV光源团队近年来在液滴发生器方面的研究进展,包括液滴直径、重复频率、间距、位置和稳定性等。现阶段研制的锡液滴发生器,在100 kHz频率下喷射的锡液滴直径约为40 μm,间距约为230 μm,工作时长接近5 h。锡液滴在10 s短时间内,竖直和水平方向的位置不稳定性分别约为2 μm和1 μm。未来锡液滴的可用性性能(如液滴直径、工作时长和长时间的位置稳定性)还需进一步提升。
极紫外 光刻光源 液滴发生器 锡液滴 
激光与光电子学进展
2023, 60(23): 2314001
陈聪 1,2廖洋 2,*郭向朝 3崔新强 3[ ... ]冷雨欣 2,**
作者单位
摘要
1 上海理工大学光电信息与计算机工程学院上海市现代光学系统重点实验室,上海 200093
2 中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海 201800
3 中国科学院上海光学精密机械研究所高功率激光单元技术实验室,上海 201800
为实现石英玻璃的快速密封焊接,本文提出了一种利用皮秒激光进行两步扫描的焊接方法,首先利用较高能量脉冲快速扫描,在玻璃界面形成初步焊接,再利用较低能量脉冲慢速扫描,扩大熔池体积。在焊接强度和密封性能等方面,将两步扫描焊接与传统单步扫描焊接进行了对比,结果表明:两步扫描焊接样品具有更高的焊接强度(平均剪切强度达到了45 MPa),同时可实现更好的密封效果。为了探究不同间隙宽度下玻璃焊接强度的变化,通过滴加含不同直径SiO2微球的分散液增大玻璃间隙,结果发现两步扫描方法可以对间隙超过27 μm的石英玻璃进行一定强度的焊接(剪切强度为2.4 MPa)。基于此方法,成功实现了石英玻璃的高强度快速密封焊接,并利用单一皮秒激光扫描平台演示了微通道的快速制备和封装。
激光技术 玻璃连接 密封焊接 两步扫描 微通道封装 皮秒激光 
中国激光
2023, 50(20): 2002101
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China
We demonstrate an ultra-broadband high temporal contrast infrared laser source based on cascaded optical parametric amplification, hollow-core fiber (HCF) and second harmonic generation processes. In this setup, the spectrum of an approximately 1.8 μm laser pulse has near 1 μm full bandwidth by employing an argon gas-filled HCF. Subsequently, after frequency doubling with cascaded crystals and dispersion compensation by a fused silica wedge pair, 9.6 fs (~3 cycles) and 150 μJ pulses centered at 910 nm with full bandwidth of over 300 nm can be generated. The energy stability of the output laser pulse is excellent with 0.8% (root mean square) over 20 min, and the temporal contrast is >1012 at –10 ps before the main pulse. The excellent temporal and spatial characteristics and stability make this laser able to be used as a good seed source for ultra-intense and ultrafast laser systems.
few-cycle laser high temporal contrast ultra-broadband ultrafast laser 
High Power Laser Science and Engineering
2023, 11(1): 010000e5
Liya Shen 1,2,3Yanyan Li 1,*Wenkai Li 1Jiajun Song 1[ ... ]Yuxin Leng 1,2,3,*
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China
2 School of Physical Science and Technology, ShanghaiTech University, Shanghai, China
3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China
Temporal contrast directly affects the interaction between ultraintense and ultrashort pulse lasers with matter. Seed laser sources with broad bandwidth and high temporal contrast are significant for overall temporal contrast enhancement. The technique of cascaded nonlinear processes with optical parametric amplification and second-harmonic generation is demonstrated for high temporal contrast seed source generation. Within 40 ps before the main pulse, the temporal contrast reaches over 1011. The pulse energy and duration of the high-contrast pulse are 112 μJ and 70 fs, respectively. Considering its high beam quality and stability, this laser source can serve as a high-quality seed for Nd:glass-based ultraintense and ultrashort pulse laser facilities.
high temporal contrast nonlinear effect optical parametric amplification 
High Power Laser Science and Engineering
2023, 11(1): 010000e1
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Zhangjiang Laboratory, Shanghai 201210, China
Here, we report the recent progress on the front end developed for the 100 PW-class laser facility. Using 3 stages of optical parametric chirped-pulse amplification (OPCPA) based on lithium triborate (LBO) crystals, we realized a 5.26 J/0.1 Hz amplified output with a bandwidth over 200 nm near the center wavelength of 925 nm. After the compressor, we obtained a pulse duration of 13.4 fs. As the compression efficiency reached 67%, this OPCPA front end could potentially support a peak power of 263 TW at a repetition rate of 0.1 Hz. To the best of our knowledge, among all the 100 TW-level OPCPA systems, it shows the widest spectral width, the shortest pulse duration, and it is also the first OPCPA system working at a repetition-rate mode.
Ultrafast Science
2022, 2(1): 9894358
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China
3 School of Physical Science and Technology, ShanghaiTech University, Shanghai, China
Infrared femtosecond optical vortices open up many new research fields, such as optical micro–nano manipulation, time-resolved nonlocal spectroscopy in solids, vortex secondary radiation and particle generations. In this article, we demonstrate a femtosecond optical vortex laser system based on a two-stage optical parametric amplifier. In our experiment, 1.45 μm vortex signal pulses with energy of 190 μJ and 1.8 μm vortex idler pulses with energy of 158 μJ have been obtained, and the pulse durations are 51 and 48 fs, respectively. Both the energy fluctuations of the signal and idler pulses are less than 0.5% (root mean square), and the spectral fluctuations are less than 1.5% within 1 hour. This type of highly stable femtosecond optical vortex laser has a wide range of applications for vortex strong-field physics.
infrared lasers optical vortex ultrafast lasers 
High Power Laser Science and Engineering
2022, 10(5): 05000e29
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai, China
2 School of Physical Science and Technology, ShanghaiTech University, Shanghai, China
3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China
We demonstrate the simultaneous temporal contrast improvement and pulse compression of a Yb-doped femtosecond laser via nonlinear elliptical polarization rotation in a solid state multi-pass cell. The temporal contrast is improved to 109, while the pulse is shortened from 181 to 36 fs, corresponding to a compression factor of 5. The output beam features excellent beam quality with M2 values of 1.18 × 1.16. The total efficiency of the contrast enhancement system exceeds 50%. This technique will have wide applications in high temporal contrast ultra-intense femtosecond lasers.
multi-pass cell nonlinear elliptical polarization rotation pulse compression temporal contrast 
High Power Laser Science and Engineering
2022, 10(5): 05000e28
林楠 1,2,*杨文河 1,2陈韫懿 1,2魏鑫 1,2[ ... ]冷雨欣 2,**
作者单位
摘要
1 上海大学微电子学院,上海 200072
2 中国科学院上海光学精密机械研究所精密光学工程部(筹),上海 201800

随着芯片特征尺寸的不断减小,借助193 nm准分子光源的浸没式深紫外光刻技术已进入瓶颈,使用多次曝光技术的工艺路线也已到达目前的商用极限。极紫外光刻(EUVL)采用13.5 nm的极紫外光源,被认为是下一代光刻商用化路线必需的技术。综述了激光等离子体13.5 nm EUVL光源的原理和最新进展,分别从驱动光源、靶材、收集镜等关键子系统展开介绍。讨论了激光等离子体光源进一步发展过程中需要解决的问题,如提升激发光功率、提高转换效率及延长光源寿命,特别分析了日本Gigaphoton公司和荷兰ASML公司的EUVL光源装置。

光学设计 极紫外光源 激光等离子体 液滴锡靶 转换效率 光源碎屑 
激光与光电子学进展
2022, 59(9): 0922002
作者单位
摘要
1 中国科学院上海光学精密机械研究所,上海 201800
2 中国科学院西安光学精密机械研究所,上海 201800
中国激光
2021, 48(23): 2316003

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